发明申请
- 专利标题： MEMS SCANNER HAVING ACTUATOR SEPARATED FROM MIRROR
- 专利标题（中）： 具有从镜子分离的致动器的MEMS扫描仪
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申请号： US12054615申请日： 2008-03-25
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公开(公告)号： US20090109512A1公开(公告)日： 2009-04-30
- 发明人: Yong-hwa Park
- 申请人： Yong-hwa Park
- 申请人地址： KR Suwon-si
- 专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人地址： KR Suwon-si
- 优先权： KR10-2007-0107433 20071024
- 主分类号： G02B26/10
- IPC分类号： G02B26/10
摘要：
A microelectromechanical systems (MEMS) scanner is provided. The MEMS scanner includes: a stationary frame; a first movable stage disposed inside the stationary frame and suspended on the stationary frame so as to pivot and vibrate around a virtual center shaft; a second movable stage disposed inside the first movable stage and suspended on the first movable stage so as to pivot and vibrate around the center shaft; and an actuator providing a driving force used to pivot and vibrate the first movable stage.
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