发明申请
- 专利标题： PROCESS FOR COLLECTIVE MANUFACTURING OF SMALL VOLUME HIGH PRECISION MEMBRANES AND CAVITIES
- 专利标题（中）： 集中制造小容量高精密膜和CAVIQU的过程
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申请号： US12298894申请日： 2007-04-26
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公开(公告)号： US20090130822A1公开(公告)日： 2009-05-21
- 发明人: Joel Collet , Stephane Nicolas , Christian Pisella
- 申请人： Joel Collet , Stephane Nicolas , Christian Pisella
- 申请人地址： FR CROLLES
- 专利权人： TRONIC'S MICROSYSTEMS
- 当前专利权人： TRONIC'S MICROSYSTEMS
- 当前专利权人地址： FR CROLLES
- 优先权： FR0651511 20060428
- 国际申请： PCT/EP2007/054106 WO 20070426
- 主分类号： H01L21/98
- IPC分类号： H01L21/98 ; H01L21/306
摘要：
The invention relates to a process for collective manufacturing of cavities and/or membranes (24), with a given thickness d, in a wafer said to be a semiconductor on insulator layer, comprising at least one semiconducting surface layer with a thickness d on an insulating layer, this insulating layer itself being supported on a substrate, this process comprising: etching of the semiconducting surface layer with thickness d, the insulating layer forming a stop layer, to form said cavities and/or membranes in the surface layer.
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