Invention Application
US20090134543A1 Vacuum Film Forming Apparatus and Vacuum Film Forming Method 审中-公开
真空成膜装置和真空膜成型方法

Vacuum Film Forming Apparatus and Vacuum Film Forming Method
Abstract:
A vacuum film forming apparatus includes a target chamber in which a target is disposed for performing a vacuum film forming; a first mold at a side of the target chamber; and a second mold that includes a workpiece chamber in which a workpiece is capable of being disposed. The first mold and the second mold are structured such that a film being formed onto the workpiece is capable of being carried out by die matching between the first mold and the second mold, and a shutter device for opening and closing the target chamber is provided to the first mold.
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