发明申请
- 专利标题： MASKING PASTE, METHOD OF MANUFACTURING SAME, AND METHOD OF MANUFACTURING SOLAR CELL USING MASKING PASTE
- 专利标题（中）： 掩模膏，其制造方法和使用掩模膏制造太阳能电池的方法
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申请号： US12063542申请日： 2006-08-08
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公开(公告)号： US20090142911A1公开(公告)日： 2009-06-04
- 发明人: Naoki Asano , Yasushi Funakoshi
- 申请人： Naoki Asano , Yasushi Funakoshi
- 优先权： JP2005-234466 20050812; JP2005-270200 20050916
- 国际申请： PCT/JP2006/315632 WO 20060808
- 主分类号： H01L21/22
- IPC分类号： H01L21/22
摘要：
A masking paste used as a mask for controlling diffusion when diffusing a p-type dopant and an n-type dopant into a semiconductor substrate and forming a high-concentration p-doped region and a high concentration n-doped region is provided that contains at least a solvent, a thickening agent, and SiO2 precursor and/or a TiO2 precursor, Further, a manufacturing method of a solar cell is provided in which the masking paste is pattern-formed on the semiconductor substrate and then the p-type dopant and the n-type dopant are diffused.
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