发明申请
- 专利标题： Hexafluoroalcohol-based Monomers and Processes of Preparation Thereof
- 专利标题（中）： 六氟乙醇基单体及其制备方法
-
申请号： US11719138申请日： 2005-11-14
-
公开(公告)号： US20090143611A1公开(公告)日： 2009-06-04
- 发明人: Shahrokh Motallebi , Denis Desilets , Ian Marcotte , Luc Bouchard , Khalil Feghali , Pushkara Rao Varanasi , Mahmoud Khojasteh
- 申请人： Shahrokh Motallebi , Denis Desilets , Ian Marcotte , Luc Bouchard , Khalil Feghali , Pushkara Rao Varanasi , Mahmoud Khojasteh
- 申请人地址： CA Quebec US NY Armonk
- 专利权人： ST-JEAN PHOTOCHIMIE INC.,INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人： ST-JEAN PHOTOCHIMIE INC.,INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址： CA Quebec US NY Armonk
- 国际申请： PCT/CA05/01728 WO 20051114
- 主分类号： C07C69/74
- IPC分类号： C07C69/74
摘要：
The present invention relates to compounds of formula (I): wherein R1 is H, or a C1-C10 linear, branched or cyclic alkyl group which is unsubstituted or substituted with fluorine; R2 is an alicyclic group having 5 to 20 carbon atoms which is unsubstituted or substituted with fluorine; and R3 represents a C1-C10 linear or branched alkylene which is unsubstituted or substituted with fluorine. Processes for preparing such compounds are also disclosed. The compounds of the present invention can be used as monomers in the fields of photolithography and semiconductor fabrication.
信息查询
