Invention Application
US20090147330A1 Laser processing apparatus 有权
激光加工设备

Laser processing apparatus
Abstract:
A laser processing apparatus includes a laser source (11), a spatial phase modulator (13) configured to modulate a phase of a laser beam emitted from the laser source, a synthetic data generator (17) configured to generate synthetic data by combining hologram image data representing a pattern image to be processed with position displacement hologram data for shifting the pattern image to a prescribed position, the synthetic data being input to the spatial phase modulator for the phase modulation of the laser beams, and a focusing optical unit (14) configured to guide the phase-modulated laser beam onto a surface to be processed to reproduce the pattern image on the processed surface.
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