Invention Application
- Patent Title: Laser processing apparatus
- Patent Title (中): 激光加工设备
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Application No.: US10582895Application Date: 2005-10-12
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Publication No.: US20090147330A1Publication Date: 2009-06-11
- Inventor: Manabu Seo , Yasufumi Yamada , Yoshihiro Norikane
- Applicant: Manabu Seo , Yasufumi Yamada , Yoshihiro Norikane
- Priority: JP2004-298837 20041013
- International Application: PCT/JP05/19158 WO 20051012
- Main IPC: G03H1/12
- IPC: G03H1/12

Abstract:
A laser processing apparatus includes a laser source (11), a spatial phase modulator (13) configured to modulate a phase of a laser beam emitted from the laser source, a synthetic data generator (17) configured to generate synthetic data by combining hologram image data representing a pattern image to be processed with position displacement hologram data for shifting the pattern image to a prescribed position, the synthetic data being input to the spatial phase modulator for the phase modulation of the laser beams, and a focusing optical unit (14) configured to guide the phase-modulated laser beam onto a surface to be processed to reproduce the pattern image on the processed surface.
Public/Granted literature
- US07910869B2 Laser processing apparatus using distinct horizontal and vertical data sets Public/Granted day:2011-03-22
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