发明申请
- 专利标题: OPTICAL SYSTEM FOR DETECTING MOTION OF A BODY
- 专利标题(中): 用于检测身体运动的光学系统
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申请号: US11719561申请日: 2005-11-16
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公开(公告)号: US20090153880A1公开(公告)日: 2009-06-18
- 发明人: Renatus Gerardus Klaver , Johan Cornelis Compter , Piet Van Der Meer
- 申请人: Renatus Gerardus Klaver , Johan Cornelis Compter , Piet Van Der Meer
- 申请人地址: NL EINDHOVEN
- 专利权人: KONINKLIJKE PHILIPS ELECTRONICS, N.V.
- 当前专利权人: KONINKLIJKE PHILIPS ELECTRONICS, N.V.
- 当前专利权人地址: NL EINDHOVEN
- 优先权: EP04105956.9 20041122
- 国际申请: PCT/IB05/53790 WO 20051116
- 主分类号: G01B11/00
- IPC分类号: G01B11/00
摘要:
The invention relates to a system (1) for detecting motion of a body (2), said body comprising a first diffraction pattern (3A) and a second diffraction pattern (3B) with a predetermined orientation relative to said first diffraction pattern. The system comprises optical means (4A, 4B) adapted to provide at least a first incident beam to said first diffraction pattern to obtain a first diffracted beam from said first diffraction pattern and at least a second incident beam, with a predetermined orientation relative to said first incident beam, to said second diffraction pattern to obtain a second diffracted beam from said second diffraction pattern. The system has means for detecting motion of said body on the basis of the phase difference between at least one of said first diffracted beam and said second diffracted beam. Accordingly a larger in-plane rotation range is obtained for detecting motion of the body (2). The invention also relates to a wafer (2) provided with two-dimensional diffraction patterns (3A,3B) and a method for detecting motion of a body.
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