发明申请
- 专利标题： MODULAR FLOW CELL AND ADJUSTMENT SYSTEM
- 专利标题（中）： 模块化流量单元和调整系统
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申请号： US12333226申请日： 2008-12-11
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公开(公告)号： US20090155936A1公开(公告)日： 2009-06-18
- 发明人: Kurt Weiner , Aaron Francis , Ken Williams
- 申请人： Kurt Weiner , Aaron Francis , Ken Williams
- 主分类号： H01L21/66
- IPC分类号： H01L21/66
摘要：
A combinatorial processing system having modular dispense heads is provided. The modular dispense heads are disposed on a rail system enabling an adjustable pitch of the modular dispense heads for the combinatorial processing. The modular dispense heads are configured so that sections of the modular dispense heads are detachable in order to accommodate various processes through a first section without having to completely disconnect and re-connect facilities to a second section.
公开/授权文献
- US09059223B2 Modular flow cell and adjustment system 公开/授权日：2015-06-16
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