Invention Application
US20090159409A1 MEMS MICROSWITCH HAVING A DUAL ACTUATOR AND SHARED GATE 有权
具有双致动器和共享门的MEMS微型显示器

MEMS MICROSWITCH HAVING A DUAL ACTUATOR AND SHARED GATE
Abstract:
In accordance with one aspect of the present invention, a MEMS switch is provided. The MEMS switch includes a substrate, a first and a second actuating element electrically coupled together, an anchor mechanically coupled to the substrate and supporting at least one of the first and second actuating elements, and a gate driver configured to actuate the first and second actuating elements.
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