发明申请
- 专利标题: METHOD OF MANUFACTURING LIQUID EJECTION HEAD
- 专利标题(中): 制造液体喷射头的方法
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申请号: US12334149申请日: 2008-12-12
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公开(公告)号: US20090162797A1公开(公告)日: 2009-06-25
- 发明人: Shinsuke Tsuji , Shoji Shiba , Tamaki Sato
- 申请人: Shinsuke Tsuji , Shoji Shiba , Tamaki Sato
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2007-327406 20071219
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
A method of manufacturing a liquid ejection head includes a step of forming a layer of a positive-type photosensitive resin on a substrate; a step of forming a pattern, used to form a liquid channel, by exposing the positive-type photosensitive resin layer to light; a step of forming a photosensitive layer, used to form a discharge port-forming member, on the pattern; and a step of forming a discharge port in such a manner that the photosensitive layer is patterned by exposing the photosensitive layer to i-line. The pattern has a predetermined absorbance for i-line and contains a specific compound.
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