发明申请
US20090168636A1 CANTILEVER DESIGN WITH ELECTROSTATIC-FORCE-MODULATED PIEZORESPONSE FORCE MICROSCOPY (PFM) SENSING
审中-公开
具有静电力调节PIEZORESPONSE力微结构(PFM)传感器的CANTILEVER设计
- 专利标题: CANTILEVER DESIGN WITH ELECTROSTATIC-FORCE-MODULATED PIEZORESPONSE FORCE MICROSCOPY (PFM) SENSING
- 专利标题(中): 具有静电力调节PIEZORESPONSE力微结构(PFM)传感器的CANTILEVER设计
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申请号: US11967721申请日: 2007-12-31
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公开(公告)号: US20090168636A1公开(公告)日: 2009-07-02
- 发明人: TSUNG-KUAN ALLEN CHOU
- 申请人: TSUNG-KUAN ALLEN CHOU
- 主分类号: G11B9/00
- IPC分类号: G11B9/00
摘要:
In one embodiment, the present invention includes an apparatus having a cantilever structure to move in a vertical direction, including a grounded cantilever body and a conductive tip, a vertical actuation electrode to actuate the cantilever to cause the conductive tip to contact a ferroelectric media surface, an AC electrostatic drive electrode to produce electrostatic forces to cause the cantilever structure to vibrate, and a sensing trace coupled with the conductive tip to sense charge generated by the ferroelectric media surface in response to a force applied by the conductive tip. Other embodiments are described and claimed.
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