发明申请
- 专利标题: METHOD OF MANUFACTURING MOS TRANSISTOR
- 专利标题(中): 制造MOS晶体管的方法
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申请号: US12344551申请日: 2008-12-28
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公开(公告)号: US20090170257A1公开(公告)日: 2009-07-02
- 发明人: Bong-Kil Kim
- 申请人: Bong-Kil Kim
- 优先权: KR10-2007-0141354 20071231
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238
摘要:
A method of manufacturing a transistor may include: forming a first well over a silicon substrate; forming a first mask pattern over the silicon substrate and using the formed first mask pattern to form a second well; removing the first mask pattern; forming a second mask pattern over the silicon substrate and using the formed second mask pattern to form a first drift region; removing the second mask pattern; forming a third mask pattern and using the formed third mask pattern to form a second drift region; removing the third mask pattern; forming a field oxide film over the silicon substrate; and introducing first conductive impurity ions into an upper surface of the silicon substrate by channel ion implantation.
公开/授权文献
- US07632732B2 Method of manufacturing MOS transistor 公开/授权日:2009-12-15
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