发明申请
- 专利标题: POLISHING COMPOSITION
- 专利标题(中): 抛光组合物
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申请号: US12341241申请日: 2008-12-22
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公开(公告)号: US20090173910A1公开(公告)日: 2009-07-09
- 发明人: Tatsuhiko HIRANO , Hiroshi Mizuno , Yasuyuki Yamato , Akihito Yasui
- 申请人: Tatsuhiko HIRANO , Hiroshi Mizuno , Yasuyuki Yamato , Akihito Yasui
- 申请人地址: JP Kiyosu-shi
- 专利权人: FUJIMI INCORPORATED
- 当前专利权人: FUJIMI INCORPORATED
- 当前专利权人地址: JP Kiyosu-shi
- 优先权: JP2007-339472 20071228
- 主分类号: C09K13/00
- IPC分类号: C09K13/00
摘要:
To provide a polishing composition which can satisfy both suppression of the surface topography and a high stock removal rate, in a polishing step in the production of a wiring structure.A polishing composition comprising abrasive grains, a processing accelerator, a nonionic surfactant represented by R-POE (I) (wherein R is a C10-16 alkyl group having a branched structure, and POE is a polyoxyethylene chain) and having an HLB of from 7 to 12, an anionic surfactant, a protective film-forming agent, an oxidizing agent, and water.
公开/授权文献
- US08864860B2 Polishing composition 公开/授权日:2014-10-21
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