发明申请
- 专利标题： Micromirror device with a single address electrode
- 专利标题（中）： 具有单个地址电极的微镜器件
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申请号： US12072448申请日： 2008-02-25
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公开(公告)号： US20090174926A1公开(公告)日： 2009-07-09
- 发明人: Yoshihiro Maeda , Fusao Ishii , Hirokazu Nishino , Kazuma Arai
- 申请人： Yoshihiro Maeda , Fusao Ishii , Hirokazu Nishino , Kazuma Arai
- 主分类号： G02B26/08
- IPC分类号： G02B26/08
摘要：
A micromirror device comprises a plurality of mirrors arranged on a substrate, an elastic hinge for supporting each mirror to be deflectable in a plurality of directions, an address electrode composed of first and second regions that are arranged across the deflection axis of each mirror, and a driving circuit for controlling the mirror to deflect in the directions of the first and the second regions.
公开/授权文献
- US07839561B2 Micromirror device with a single address electrode 公开/授权日：2010-11-23
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