发明申请
US20090176677A1 Treating liquid for photoresist removal, and method for treating substrate
审中-公开
处理用于光刻胶去除的液体,以及处理底物的方法
- 专利标题: Treating liquid for photoresist removal, and method for treating substrate
- 专利标题(中): 处理用于光刻胶去除的液体,以及处理底物的方法
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申请号: US12382231申请日: 2009-03-11
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公开(公告)号: US20090176677A1公开(公告)日: 2009-07-09
- 发明人: Takayuki Haraguchi , Kazumasa Wakiya , Shigeru Yokoi
- 申请人: Takayuki Haraguchi , Kazumasa Wakiya , Shigeru Yokoi
- 优先权: JP2004-296606 20041008
- 主分类号: G03F7/42
- IPC分类号: G03F7/42
摘要:
Disclosed are a treating liquid for photoresist removal, containing (a) an oxidizing agent (e.g., aqueous hydrogen peroxide), (b) at least one selected from alkylene carbonates and their derivatives (e.g., propylene carbonate), and (c) water; and a method for treating with the treating liquid a substrate having a photoresist film deteriorated after dry-etching treatment thereof or a substrate optionally subjected to plasma-ashing treatment after the dry-etching treatment, and then treating it with a photoresist-stripping liquid for stripping off the photoresist.
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