发明申请
- 专利标题: Nanotube Processing Employing Solid-Condensed-Gas-Layers
- 专利标题(中): 使用固体 - 气相层的纳米管加工
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申请号: US12409580申请日: 2009-03-24
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公开(公告)号: US20090179005A1公开(公告)日: 2009-07-16
- 发明人: Jene A. Golovchenko , Gavin M. King , Gregor M. Schurmann , Daniel Branton
- 申请人: Jene A. Golovchenko , Gavin M. King , Gregor M. Schurmann , Daniel Branton
- 申请人地址: US MA Cambridge
- 专利权人: PRESIDENT AND FELLOWS OF HARVARD COLLEGE
- 当前专利权人: PRESIDENT AND FELLOWS OF HARVARD COLLEGE
- 当前专利权人地址: US MA Cambridge
- 主分类号: C23F1/00
- IPC分类号: C23F1/00
摘要:
In a method for processing a nanotube, a vapor is condensed to a solid condensate layer on a surface of the nanotube and then at least one selected region of the condensate layer is locally removed by directing a beam of energy at the selected region. The nanotube can be processed with at least a portion of the solid condensate layer maintained on the nanotube surface and thereafter the solid condensate layer removed. Nanotube processing can include, e.g., depositing a material layer on an exposed nanotube surface region where the condensate layer was removed. After forming a solid condensate layer, an electron beam can be directed at a selected region along a nanotube length corresponding to a location for cutting the nanotube, to locally remove the condensate layer at the region, and an ion beam can be directed at the selected region to cut the nanotube at the selected region.
公开/授权文献
- US08273257B2 Nanotube processing employing solid-condensed-gas-layers 公开/授权日:2012-09-25
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