发明申请
US20090194509A1 SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE TREATMENT METHOD 有权
基板处理装置和基板处理方法

  • 专利标题: SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE TREATMENT METHOD
  • 专利标题(中): 基板处理装置和基板处理方法
  • 申请号: US12362945
    申请日: 2009-01-30
  • 公开(公告)号: US20090194509A1
    公开(公告)日: 2009-08-06
  • 发明人: Kazunari NadaKenichiro Arai
  • 申请人: Kazunari NadaKenichiro Arai
  • 优先权: JP2008-021779 20080131; JP2008-307996 20081202
  • 主分类号: C23F1/00
  • IPC分类号: C23F1/00 C23F1/08
SUBSTRATE TREATMENT APPARATUS, AND SUBSTRATE TREATMENT METHOD
摘要:
The substrate treatment apparatus according to the present invention includes a substrate holding mechanism which holds a substrate, a nozzle body having a spout which spouts an etching liquid toward a major surface of the substrate held by the substrate holding mechanism, a nozzle body movement mechanism which moves the nozzle body in a predetermined movement direction so as to move an etching liquid application position at which the etching liquid is applied on the major surface, a first flexible sheet attached to the nozzle body to be brought into contact with a portion of the major surface located on one of opposite sides of the etching liquid application position with respect to the movement direction, and a second flexible sheet attached to the nozzle body to be brought into contact with a portion of the major surface located on the other side of the etching liquid application position with respect to the movement direction.
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