发明申请
US20090196724A1 EDGE CONTACT GRIPPER 审中-公开
边缘联系人

EDGE CONTACT GRIPPER
摘要:
The present invention generally provides a method and apparatus for supporting and transferring a substrate. One embodiment of the present invention provides an apparatus configured for handling a substrate comprising a base member, a first finger movably connected with the base member, wherein the first finger is pivotable about a pivoting axis, a second finger movably connected with the base member, wherein the second finger is pivotable about the pivoting axis, the first and second fingers form an opening, and pivoting of the first and second fingers allow the opening to vary for receiving a substrate and for carrying the substrate by contacting an edge of the substrate, and an actuator connected with the first finger and second finger, wherein the actuator is configured to pivot the first and second fingers simultaneously along opposite directions.
信息查询
0/0