An optical waveguide device including a dielectric substrate and a folded waveguide formed on the substrate, including a first waveguide and a second waveguide, one part of the first waveguide being connected to one end of the second waveguide at a first coupling portion, the other end of the second waveguide connected to another part of the first waveguide at a second coupling portion, the first waveguide being straight or curved with a radius of curvature larger than or equal to a first curvature radius, and the second waveguide being straight or curved with a radius of curvature smaller than the first curvature radius. An outer groove is formed on the substrate along an outer peripheral of the folded waveguide, an input-side inner groove is formed on the substrate near a first coupling portion, and an output-side inner groove is formed on the substrate near a second coupling portion.