发明申请
- 专利标题： METHODS AND APPARATUS FOR AN EFFICIENT HANDSHAKE BETWEEN MATERIAL HANDLING AND MATERIAL PROCESSING DEVICES FOR SAFE MATERIAL TRANSFER
- 专利标题（中）： 材料处理和材料加工装置之间的有效手段的安全材料转移的方法和装置
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申请号： US12369722申请日： 2009-02-11
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公开(公告)号： US20090202336A1公开(公告)日： 2009-08-13
- 发明人: Vinay K. Shah , Sushant S. Koshti
- 申请人： Vinay K. Shah , Sushant S. Koshti
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; B25J11/00
摘要：
Methods and systems are provided. The invention includes performing a handshake directly between a load port associated with process equipment and material handling equipment; and transferring a carrier between the material handling equipment and the load port based on the handshake. Numerous other aspects are provided.