发明申请
- 专利标题： Micromechanical diaphragm sensor having a double diaphragm
- 专利标题（中）： 具有双隔膜的微机械隔膜传感器
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申请号： US11884563申请日： 2005-12-21
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公开(公告)号： US20090206422A1公开(公告)日： 2009-08-20
- 发明人: Matthias Illing , Heribert Weber , Christoph Schelling , Heiko Stahl , Stefan Weiss
- 申请人： Matthias Illing , Heribert Weber , Christoph Schelling , Heiko Stahl , Stefan Weiss
- 优先权： DE102005007540.1 20050218
- 国际申请： PCT/EP05/57023 WO 20051221
- 主分类号： H01L29/84
- IPC分类号： H01L29/84 ; H01L21/02
摘要：
A method for producing a micromechanical diaphragm sensor, and a micromechanical diaphragm sensor produced with the method. The micromechanical diaphragm sensor has at least one first diaphragm as well as a second diaphragm, which is disposed essentially on top of the first diaphragm. Furthermore, the micromechanical diaphragm sensor has a first cavity and a second cavity, which is essentially disposed above the first cavity.
公开/授权文献
- US07863072B2 Micromechanical diaphragm sensor having a double diaphragm 公开/授权日：2011-01-04
信息查询
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