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发明申请
US20090206707A1 Circular cylinder type piezoelectric actuator and piezoelectric element and scanning probe microscope using those 有权
圆柱型压电致动器及压电元件及扫描探针显微镜

  • 专利标题： Circular cylinder type piezoelectric actuator and piezoelectric element and scanning probe microscope using those
  • 专利标题（中）： 圆柱型压电致动器及压电元件及扫描探针显微镜
  • 申请号： US12378139
    申请日： 2009-02-11
  • 公开(公告)号： US20090206707A1
    公开(公告)日： 2009-08-20
  • 发明人: Masato Iyoki
  • 申请人： Masato Iyoki
  • 优先权： JP2008-030614 20080212
  • 主分类号： H01L41/047
  • IPC分类号： H01L41/047
Circular cylinder type piezoelectric actuator and piezoelectric element and scanning probe microscope using those
摘要：
The cylindrical piezoelectric actuator which comprised a piezoelectric element which provided electrode in each of an inner peripheral face and an outer peripheral face which was cylindrical at least, and drive power supply to drive it. And the outer side electrode of the piezoelectric element covered the substantially circumferential outer face entirety and it was connected to a ground potential, and the electrode in the internal perimeter surface connected to drive power supply.
摘要（中）：

该圆柱形压电致动器包括一个压电元件，该压电元件至少在圆筒形的内周面和外周面中设置电极，驱动电源驱动该压电元件。 并且压电元件的外侧电极覆盖基本圆周的外表面整体，并且其连接到接地电位，并且内周边表面中的电极连接以驱动电源。

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