发明申请
US20090207393A1 Damping Arrangement, Active Damping System, Lithographic Apparatus, And Projection Assembly 失效
阻尼布置,主动阻尼系统,平版印刷设备和投影组件

Damping Arrangement, Active Damping System, Lithographic Apparatus, And Projection Assembly
摘要:
An active damping system assembly is configured to dampen a vibration of at least part of a structure. The assembly includes a plurality of active dampers each including a sensor configured to measure a position quantity of an interface mass mounted on the structure; and an actuator configured to exert a force on the interface mass in dependency of a signal provided by the sensor, wherein each of the plurality of active damping systems is connected to the interface mass. The structure may be a projection system of a lithographic apparatus.
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