发明申请
- 专利标题: Semiconductor substrates and manufacturing methods of the same
- 专利标题(中): 半导体衬底及其制造方法相同
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申请号: US12219360申请日: 2008-07-21
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公开(公告)号: US20090212364A1公开(公告)日: 2009-08-27
- 发明人: Won-joo Kim , Tae-hee Lee , Dae-kil Cha , Yoon-dong Park
- 申请人: Won-joo Kim , Tae-hee Lee , Dae-kil Cha , Yoon-dong Park
- 专利权人: Samsung Electronics Co., Ltd
- 当前专利权人: Samsung Electronics Co., Ltd
- 优先权: KR10-2008-0017419 20080226
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L21/00
摘要:
Semiconductor substrates and methods of manufacturing the same are provided. The semiconductor substrates include a substrate region, an insulation region and a floating body region. The insulation region is disposed on the substrate region. The floating body region is separated from the substrate region by the insulation region and is disposed on the insulation region. The substrate region and the floating body region are formed of materials having identical characteristics. The method of manufacturing the semiconductor substrate including forming at least one floating body pattern by etching a bulk substrate, separating the bulk substrate into a substrate region and a floating body region by etching a lower middle portion of the floating body pattern, and filling an insulating material between the floating body region and the substrate region.
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