- 专利标题: METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL
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申请号: US12436059申请日: 2009-05-05
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公开(公告)号: US20090213451A1公开(公告)日: 2009-08-27
- 发明人: Ming-Hau Tung , Lior Kogut
- 申请人: Ming-Hau Tung , Lior Kogut
- 申请人地址: US CA San Diego
- 专利权人: QUALCOMM MEMS Technology, Inc.
- 当前专利权人: QUALCOMM MEMS Technology, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: G02B26/00
- IPC分类号: G02B26/00
摘要:
Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate.
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