发明申请
US20090215920A1 SILANE POLYMER AND METHOD FOR FORMING SILICON FILM 审中-公开
硅烷聚合物和形成硅膜的方法

SILANE POLYMER AND METHOD FOR FORMING SILICON FILM
摘要:
There are provided a silane polymer having a higher molecular weight from the viewpoints of wettability when applied to a substrate, a boiling point and safety, a composition which can form a high-quality silicon film easily, a silicon film forming composition which comprises a silane polymer obtained by irradiating a photopolymerizable silane compound with light of specific wavelength range to photopolymerize it, and a method for forming a silicon film which comprises applying the composition to a substrate and subjecting the coating film to a heat treatment and/or a light treatment.
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