发明申请
- 专利标题: Semiconductor device
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申请号: US12320913申请日: 2009-02-09
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公开(公告)号: US20090224332A1公开(公告)日: 2009-09-10
- 发明人: Tomohiko Tsutsumi , Toru Anezaki , Hideyuki Kojima , Taiji Ema
- 申请人: Tomohiko Tsutsumi , Toru Anezaki , Hideyuki Kojima , Taiji Ema
- 申请人地址: JP Tokyo
- 专利权人: FUJITSU MICROELECTRONICS LIMITED
- 当前专利权人: FUJITSU MICROELECTRONICS LIMITED
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-237696 20040817
- 主分类号: H01L27/11
- IPC分类号: H01L27/11 ; H01L21/8239
摘要:
An n-type embedded layer is formed in an N-LV region of a SRAM cell region after an element isolation insulating film is formed on a p-type Si substrate. Thereafter, a p-well and an n-well are formed. In formation of a channel-doped layer, ion implantation is also performed into the N-LV region of the SRAM cell region in parallel with ion implantation into an N-LV of a logic circuit region. Ion-implantation is further performed into the N-LV region of the SRAM cell region in parallel with ion implantation into an N-MV of an I/O region.
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