发明申请
US20090224436A1 IMPRINT METHOD AND TEMPLATE FOR IMPRINTING 有权
IMPRINT方法和模版

  • 专利标题: IMPRINT METHOD AND TEMPLATE FOR IMPRINTING
  • 专利标题(中): IMPRINT方法和模版
  • 申请号: US12398479
    申请日: 2009-03-05
  • 公开(公告)号: US20090224436A1
    公开(公告)日: 2009-09-10
  • 发明人: Shinji MIKAMIIkuo YONEDA
  • 申请人: Shinji MIKAMIIkuo YONEDA
  • 优先权: JP2008-56394 20080306
  • 主分类号: B29C59/16
  • IPC分类号: B29C59/16 G03F7/00
IMPRINT METHOD AND TEMPLATE FOR IMPRINTING
摘要:
An imprint method, in which pattern forming is performed by having a light curable material applied on a sample face of a substrate being a processing target hardened by being exposed to light in a state where the light curable material and a pattern formed surface of a template contact each other, the pattern formed surface having a concave-convex pattern formed thereon; wherein in one exposure performed with respect to a predetermined shot of the light curable material, an exposure amount at a light curable material on a first region which contacts a pattern formed region including the concave-convex pattern of the template is greater than an exposure amount at a light curable material on a second region which at least contacts a part of a pattern periphery region of the template, the pattern periphery region existing in a periphery of the pattern formed region of the template.
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