发明申请
US20090230603A1 HOLDING DEVICE FOR FIXING A SUBSTRATE 失效
用于固定基板的保持装置

HOLDING DEVICE FOR FIXING A SUBSTRATE
摘要:
The invention relates to a holding device (1), especially for fixing a glass substrate during a cutting process. Said holding device comprises a housing (2) and a plunger (3) which can be axially displaced in relation to the housing (2). The plunger has a first and a second end section (4, 5), the first end section (4) projecting from the housing (2) and having a suction element (6). The aim of the invention is inter alia to improve a known holding device in such a manner that the substrate can be approached and fixed almost without the application of force. The holding device (1) according to the invention is characterized in that the plunger (3) is received in the housing (2) by a pneumatic spring. A holding system (20) comprising a plurality of holding devices (1) is protected in a support plate (24), said support plate (24) having a vacuum channel collector (21) which is connected to vacuum channels (13) and which is connected to a common vacuum pump (14).
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