发明申请
- 专利标题: Methods of Fabricating Nonvolatile Semiconductor Memory Devices
- 专利标题(中): 制造非易失性半导体存储器件的方法
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申请号: US12410010申请日: 2009-03-24
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公开(公告)号: US20090239345A1公开(公告)日: 2009-09-24
- 发明人: Ki-whan Song , Byung-Gook Park
- 申请人: Ki-whan Song , Byung-Gook Park
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2005-0086443 20050915
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A nonvolatile semiconductor memory device includes a plurality of pillars protruding upward from a semiconductor substrate and having respective top surfaces and opposing sidewalls, a bit line on the top surfaces of the pillars and connecting a row of the pillars along a first direction, a pair of word lines on the opposing sidewalls of one of the plurality of pillars and crossing beneath the bit line, and a pair of memory layers interposed between respective ones of the pair of word lines and the one of the plurality of pillars. Methods of fabricating a nonvolatile semiconductor memory device include selectively etching a semiconductor substrate to form pluralities of stripes having opposing sidewalls and being arranged along a direction, forming memory layers and word lines along the sidewalls of the stripes selectively etching the stripes to form a plurality of pillars, and forming a bit line connecting the pillars and crossing above the word lines.
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