发明申请
US20090244762A1 RESIST PATTERN FORMING METHOD, MOLD STRUCTURE PRODUCING METHOD, MAGNETIC RECORDING MEDIUM PRODUCING METHOD, MAGNETIC TRANSFER METHOD AND MAGNETIC RECORDING MEDIUM 审中-公开
电阻图案形成方法,模具结构生产方法,磁记录介质制造方法,磁传输方法和磁记录介质

RESIST PATTERN FORMING METHOD, MOLD STRUCTURE PRODUCING METHOD, MAGNETIC RECORDING MEDIUM PRODUCING METHOD, MAGNETIC TRANSFER METHOD AND MAGNETIC RECORDING MEDIUM
摘要:
To provide a resist pattern forming method including: cleaning off fine powder at least on an edge of a base material to be processed; forming an imprint resist layer on a surface of the base material whose edge has been cleared of the fine powder; and forming a resist pattern on the surface of the base material by pressing, against the imprint resist layer, a concavo-convex pattern which is provided in a surface of a concavo-convex mold and which is composed of a plurality of convex portions and concave portions formed between the convex portions, so that the resist pattern is an inversion of the concavo-convex pattern.
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