发明申请
US20090250760A1 METHODS OF FORMING HIGH-K/METAL GATES FOR NFETS AND PFETS 审中-公开
形成用于NFET和PFET的高K /金属栅的方法

METHODS OF FORMING HIGH-K/METAL GATES FOR NFETS AND PFETS
摘要:
Methods of forming high-k/metal gates for an NFET and PFET and a related structure are disclosed. One method includes recessing a PFET region; forming a first high-k dielectric layer and a first metal layer over the substrate; removing the first high-k dielectric layer and the first metal over the NFET region using a mask; forming a forming a second high-k dielectric layer and a second metal layer over the substrate, the first high-k dielectric layer being different then the second high-k dielectric layer and the first metal being different than the second metal; removing the second high-k dielectric layer and the second metal over the PFET region using a mask; depositing a polysilicon over the substrate; and forming a gate over the NFET region and the PFET region by simultaneously etching the polysilicon, the first high-k dielectric layer, the first metal, the second high-k dielectric layer and the second metal.
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