发明申请
US20090255426A1 METHOD AND APPARATUS FOR PLACING SUBSTRATE SUPPORT COMPONENTS 审中-公开
用于放置基板支撑部件的方法和装置

METHOD AND APPARATUS FOR PLACING SUBSTRATE SUPPORT COMPONENTS
摘要:
An apparatus for depositing viscous material on an electronic substrate includes a frame, a dispensing unit coupled to the frame, and a substrate support assembly coupled to the frame. The substrate support assembly includes a plurality of support elements, a table coupled to the frame. The table has a support surface to support at least one support element of the plurality of support elements, and a marking device coupled to the frame. The apparatus further includes an imaging system coupled to the frame. The imaging system is configured to capture images of the support surface of the table. A controller is coupled to at least the marking device and the imaging system, and configured to manipulate the marking device to mark the support surface of the table on predetermined positions and to manipulate the imaging system to verify whether the marks on the support surface of the table are accurate. Embodiments of the apparatus and related methods are further disclosed.
信息查询
0/0