发明申请
- 专利标题： LASER SCRIBING PLATFORM AND HYBRID WRITING STRATEGY
- 专利标题（中）： 激光扫描平台和混合写字策略
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申请号： US12422189申请日： 2009-04-10
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公开(公告)号： US20090255911A1公开(公告)日： 2009-10-15
- 发明人: Sriram Krishnaswami , Shinichi Kurita , Bassam Shamoun , Benjamin M. Johnston , John M. White , Jiafa Fan , Inchen Huang , Antoine P. Manens , Wei-Sheng Lei , Wei-Yung Hsu
- 申请人： Sriram Krishnaswami , Shinichi Kurita , Bassam Shamoun , Benjamin M. Johnston , John M. White , Jiafa Fan , Inchen Huang , Antoine P. Manens , Wei-Sheng Lei , Wei-Yung Hsu
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 主分类号： B23K26/38
- IPC分类号： B23K26/38 ; B23K26/02 ; B23K26/067 ; B23K26/08
摘要：
Laser scribing can be performed on a workpiece (104) such as substrates with layers formed thereon for use in a solar panel without need to rotate the workpiece (104) during the scribing process. A series of lasers (602, 622) can be used to concurrently remove material from multiple positions on the workpiece (104). Each laser (602, 622) can have at least one scanning device (614, 630, 632) positioned along a beam path thereof in order to adjust a position of the laser output relative to the workpiece (104). By adjusting the beam or pulse positions using the scanning devices (614, 630, 632) while translating the workpiece (104), substantially any pattern can be scribed into at least one layer of the workpiece (104) without the need for any rotation of the workpiece (104).
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