发明申请
- 专利标题: CHEMICAL VAPOR DEPOSITION APPARATUS
- 专利标题(中): 化学蒸气沉积装置
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申请号: US12263781申请日: 2008-11-03
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公开(公告)号: US20090260572A1公开(公告)日: 2009-10-22
- 发明人: Changsung Sean Kim , Sang Duk Yoo , Jong Pa Hong , Won Shin Lee
- 申请人: Changsung Sean Kim , Sang Duk Yoo , Jong Pa Hong , Won Shin Lee
- 专利权人: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- 优先权: KR10-2008-0036095 20080418
- 主分类号: C23C16/455
- IPC分类号: C23C16/455 ; C23C16/458
摘要:
There is provided a chemical vapor deposition apparatus including: a chamber including a reactor where a deposition object is deposited; a first supplier including a plurality of gas pipes allowing a first gas to be jetted into the reactor in a substantially horizontal direction; a second supplier including a plurality of holes of a predetermined size having the gas pipes inserted therein, respectively; a supply flow path formed between each of the gas pipes and each of the holes, the supply flow path allowing a second gas to be supplied into the reactor in a substantially horizontal direction.
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