发明申请
US20090260572A1 CHEMICAL VAPOR DEPOSITION APPARATUS 审中-公开
化学蒸气沉积装置

CHEMICAL VAPOR DEPOSITION APPARATUS
摘要:
There is provided a chemical vapor deposition apparatus including: a chamber including a reactor where a deposition object is deposited; a first supplier including a plurality of gas pipes allowing a first gas to be jetted into the reactor in a substantially horizontal direction; a second supplier including a plurality of holes of a predetermined size having the gas pipes inserted therein, respectively; a supply flow path formed between each of the gas pipes and each of the holes, the supply flow path allowing a second gas to be supplied into the reactor in a substantially horizontal direction.
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