发明申请
- 专利标题: METHOD AND DEVICE FOR REPLACING OBJECTIVE PARTS
- 专利标题(中): 用于替换目标部件的方法和装置
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申请号: US12430633申请日: 2009-04-27
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公开(公告)号: US20090260654A1公开(公告)日: 2009-10-22
- 发明人: Bernhard Geuppert , Guido Limbach , Harald Woelfle , Peter Deufel
- 申请人: Bernhard Geuppert , Guido Limbach , Harald Woelfle , Peter Deufel
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT AG
- 当前专利权人: Carl Zeiss SMT AG
- 当前专利权人地址: DE Oberkochen
- 优先权: DEDE102006050835.1 20061027
- 主分类号: G02B7/14
- IPC分类号: G02B7/14 ; B08B3/12 ; B08B7/00 ; B08B1/00
摘要:
A method and a device for replacing objective parts, especially of a projection or illumination objective for microlithography in which an objective having an objective interior and objective parts provided therein is provided. At least one objective part is replaceably accommodated in the objective. Immediately prior to installation in the objective, the replaceable objective part is cleaned outside the objective interior in at least one cleaning room sealed off from the ambient atmosphere. Immediately after cleaning, the replaceable objective is installed in the objective without contact with the normal ambient atmosphere.