发明申请
- 专利标题: MEMORY CELL HAVING A BURIED PHASE CHANGE REGION AND METHOD FOR FABRICATING THE SAME
- 专利标题(中): 具有相位变化区域的存储单元及其制造方法
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申请号: US12107573申请日: 2008-04-22
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公开(公告)号: US20090261313A1公开(公告)日: 2009-10-22
- 发明人: Hsiang-Lan Lung , Chung Hon Lam , Min Yang , Alejandro Gabriel Schrott
- 申请人: Hsiang-Lan Lung , Chung Hon Lam , Min Yang , Alejandro Gabriel Schrott
- 申请人地址: TW Hsinchu US NY Armonk
- 专利权人: Macronix International Co., Ltd.,International Business Machines Corporation
- 当前专利权人: Macronix International Co., Ltd.,International Business Machines Corporation
- 当前专利权人地址: TW Hsinchu US NY Armonk
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
Memory cells are described along with methods for manufacturing. A memory cell as described herein includes a bottom electrode comprising a base portion and a pillar portion on the base portion, the pillar portion having a width less than that of the base portion. A dielectric surrounds the bottom electrode and has a top surface. A memory element is overlying the bottom electrode and includes a recess portion extending from the top surface of the dielectric to contact the pillar portion of the bottom electrode, wherein the recess portion of the memory element has a width substantially equal to the width of the pillar portion of the bottom electrode. A top electrode is on the memory element.
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