By irradiating a first substrate which is an evaporation donor substrate including a function layer in which films having different refractive indexes (high-refractive index films and low refractive index films) are stacked with first light (wavelength=λ1), a material layer over the first substrate is patterned, and by irradiating the first substrate with second light (wavelength=λ2) which is different from λ1, the material layer which is patterned is evaporated onto a second substrate which is a deposition target substrate.