发明申请
- 专利标题: EMBEDDED WAVEGUIDE DETECTORS
- 专利标题(中): 嵌入式波形检测器
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申请号: US12420558申请日: 2009-04-08
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公开(公告)号: US20090269878A1公开(公告)日: 2009-10-29
- 发明人: Francisco A. Leon , Lawrence C. West , Yuichi Wada , Gregory L. Wojcik , Stephen Moffatt
- 申请人: Francisco A. Leon , Lawrence C. West , Yuichi Wada , Gregory L. Wojcik , Stephen Moffatt
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
A method of fabricating a detector that involves: forming a trench in a substrate, the substrate having an upper surface; forming a first doped semiconductor layer on the substrate and in the trench; forming a second semiconductor layer on the first doped semiconductor layer and extending into the trench, the second semiconductor layer having a conductivity that is less than the conductivity of the first doped semiconductor layer; forming a third doped semiconductor layer on the second semiconductor layer and extending into the trench; removing portions of the first, second and third layers that are above a plane defined by the surface of the substrate to produce an upper, substantially planar surface and expose an upper end of the first doped semiconductor layer in the trench; forming a first electrical contact to the first semiconductor doped layer; and forming a second electrical contact to the third semiconductor doped layer.
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