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发明申请
US20090271963A1 Piezoelectric actuator and manufacturing method thereof, magnetic disk apparatus 审中-公开
压电致动器及其制造方法，磁盘装置

Piezoelectric actuator and manufacturing method thereof, magnetic disk apparatus
摘要：
A piezoelectric actuator comprises a body of a piezoelectric material, electrode patterns embedded in the body, and a sidewall protective film of a piezoelectric material covering at least a sidewall surface of the body, the sidewall protective film covering the electrode patterns at the sidewall surface of the body.
摘要（中）：

压电致动器包括压电材料体，嵌入在本体中的电极图案，以及覆盖主体的至少侧壁表面的压电材料的侧壁保护膜，侧壁保护膜覆盖在侧壁表面的电极图案 身体。

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