发明申请
US20090272200A1 MICROMECHANICAL SENSOR FOR MEASURING THE MASS FLOW RATE IN ACCORDANCE WITH THE CORIOLIS PRINCIPLE
失效
用于根据CORIOLIS原理测量质量流量的微观传感器
- 专利标题: MICROMECHANICAL SENSOR FOR MEASURING THE MASS FLOW RATE IN ACCORDANCE WITH THE CORIOLIS PRINCIPLE
- 专利标题(中): 用于根据CORIOLIS原理测量质量流量的微观传感器
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申请号: US12306012申请日: 2007-06-15
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公开(公告)号: US20090272200A1公开(公告)日: 2009-11-05
- 发明人: Roman Frahnow , Arno Steckenborn
- 申请人: Roman Frahnow , Arno Steckenborn
- 申请人地址: DE Munchen
- 专利权人: SIEMENS AKTIENGESELLSCHAFT
- 当前专利权人: SIEMENS AKTIENGESELLSCHAFT
- 当前专利权人地址: DE Munchen
- 优先权: DE102006029443.2 20060621
- 国际申请: PCT/EP2007/055946 WO 20070615
- 主分类号: G01F1/80
- IPC分类号: G01F1/80
摘要:
In a micromechanical sensor (11) for measuring a mass flow rate in accordance with the Coriolis principle, two line sections (13) are mounted in a suspension means (24) such that they can oscillate, as a result of which they can be caused to oscillate in phase opposition (essential for the measuring principle). A spacer layer (18) is provided between the layers (12a, 12b) forming the line sections (13), the spacer layer ensuring that there is a space between the line sections (13) in the quiescent state. Oscillation of the line sections in phase opposition only becomes possible at all as a result of this since this prevents collision of the line sections (13) as they approach one another.