发明申请
US20090278185A1 DEVICE STRUCTURES FOR A MEMORY CELL OF A NON-VOLATILE RANDOM ACCESS MEMORY AND DESIGN STRUCTURES FOR A NON-VOLATILE RANDOM ACCESS MEMORY
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非易失性随机访问存储器的存储单元的设备结构和非易失性随机存取存储器的设计结构
- 专利标题: DEVICE STRUCTURES FOR A MEMORY CELL OF A NON-VOLATILE RANDOM ACCESS MEMORY AND DESIGN STRUCTURES FOR A NON-VOLATILE RANDOM ACCESS MEMORY
- 专利标题(中): 非易失性随机访问存储器的存储单元的设备结构和非易失性随机存取存储器的设计结构
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申请号: US12118241申请日: 2008-05-09
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公开(公告)号: US20090278185A1公开(公告)日: 2009-11-12
- 发明人: Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier, JR. , Jed H. Rankin , Yun Shi , William R. Tonti
- 申请人: Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier, JR. , Jed H. Rankin , Yun Shi , William R. Tonti
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L29/00
- IPC分类号: H01L29/00 ; G06F9/455
摘要:
Device and design structures for memory cells in a non-volatile random access memory (NVRAM). The device structure includes a semiconductor body in direct contact with the insulating layer, a control gate electrode, and a floating gate electrode in direct contact with the insulating layer. The semiconductor body includes a source, a drain, and a channel between the source and the drain. The floating gate electrode is juxtaposed with the channel of the semiconductor body and is disposed between the control gate electrode and the insulating layer. A first dielectric layer is disposed between the channel of the semiconductor body and the floating gate electrode. A second dielectric layer is disposed between the control gate electrode and the floating gate electrode.
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