发明申请
- 专利标题: Reaction force cancel system
- 专利标题(中): 反作用力取消系统
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申请号: US12219846申请日: 2008-07-29
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公开(公告)号: US20090278411A1公开(公告)日: 2009-11-12
- 发明人: Takuya Hosobata
- 申请人: Takuya Hosobata
- 专利权人: Sumitomo Heavy Industries, Ltd.
- 当前专利权人: Sumitomo Heavy Industries, Ltd.
- 优先权: JP2007-197912 20070730
- 主分类号: H02K41/035
- IPC分类号: H02K41/035
摘要:
Increasing in size of a reaction force cancel system is suppressed. The reaction force cancel system is provided in a stage device including: a surface plate having a plurality of plate surfaces with different heights from each other, and installed on a floor via a vibration-isolating spring; and stages disposed on the plate surfaces respectively, and moving on the plate surfaces, and cancels reaction forces generated on the surface plate upon movements of the stages. In addition, the reaction force cancel system includes a first and a second reaction force canceling actuator that apply counter-thrusts to the surface plate, and a control section that controls the magnitudes of the counter-thrusts. In the reaction force cancel system, the heights of action points of counter-thrusts in the surface plate are different from each other, and the control section controls the counter-thrusts so as to counterbalance the reaction forces as resultant forces and resultant moments.
公开/授权文献
- US07948198B2 Reaction force cancel system 公开/授权日:2011-05-24
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