发明申请
- 专利标题： PIEZOELECTRIC ACTUATOR WITH GRADIENT ENCAPSULATION LAYER AND METHOD FOR THE PRODUCTION THEREOF
- 专利标题（中）： 具有梯度包层的压电致动器及其生产方法
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申请号： US12298116申请日： 2007-04-24
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公开(公告)号： US20090278423A1公开(公告)日： 2009-11-12
- 发明人: Heiner Bayer , Hellmut Freudenberg , Axel Ganster , Christoph Hamann , Oliver Hennig , Jens Dahl Jensen , Günter Lugert , Randolf Mock , Carsten Schuh
- 申请人： Heiner Bayer , Hellmut Freudenberg , Axel Ganster , Christoph Hamann , Oliver Hennig , Jens Dahl Jensen , Günter Lugert , Randolf Mock , Carsten Schuh
- 优先权： DE102006019900.6 20060428
- 国际申请： PCT/EP07/53990 WO 20070424
- 主分类号： H01L41/053
- IPC分类号： H01L41/053 ; B05D1/08
摘要：
In a method for the production of a gradient encapsulation layer 20 on a piezoelectric actuator 1, based on this gradient encapsulation layer 20, the piezoelectric actuator 1 does not 5 require an additional housing-like enveloping structure in order to be protected externally. The gradient encapsulation layer 20 is produced by cold gas spraying of particles having different material properties.
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