发明申请
- 专利标题： Stress-Inducing Structures, Methods, and Materials
- 专利标题（中）： 应力诱导结构，方法和材料
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申请号： US12122849申请日： 2008-05-19
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公开(公告)号： US20090283852A1公开(公告)日： 2009-11-19
- 发明人: Alois Gutmann , Roland Hampp , Scott Jansen
- 申请人： Alois Gutmann , Roland Hampp , Scott Jansen
- 主分类号： H01L29/06
- IPC分类号： H01L29/06 ; H01L21/762
摘要：
Stress-inducing structures, methods, and materials are disclosed. In one embodiment, an isolation region includes an insulating material in a lower portion of a trench formed in a workpiece and a stress-inducing material disposed in a top portion of the trench over the insulating material.
公开/授权文献
- US08361879B2 Stress-inducing structures, methods, and materials 公开/授权日：2013-01-29
信息查询
IPC分类:
