发明申请
- 专利标题: SYSTEM AND METHOD OF MEASURING AND MAPPING THREE DIMENSIONAL STRUCTURES
- 专利标题(中): 测量和映射三维结构的系统和方法
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申请号: US12474607申请日: 2009-05-29
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公开(公告)号: US20090284753A1公开(公告)日: 2009-11-19
- 发明人: Daniel R. Neal , Richard James Copland , David A. Neal
- 申请人: Daniel R. Neal , Richard James Copland , David A. Neal
- 申请人地址: US NM ALBUQUERQUE
- 专利权人: AMO WAVEFRONT SCIENCES, LLC
- 当前专利权人: AMO WAVEFRONT SCIENCES, LLC
- 当前专利权人地址: US NM ALBUQUERQUE
- 主分类号: G01B11/24
- IPC分类号: G01B11/24
摘要:
A system for mapping a three-dimensional structure includes a projecting optical system adapted to project light onto an object, a correction system adapted to compensate the light for at least one aberration in the object, an imaging system adapted to collect light scattered by the object and a wavefront sensor adapted to receive the light collected by the imaging system and to sense a wavefront of the received light. For highly aberrated structures, a number of wavefront measurements are made which are valid over different portions of the structure, and the valid wavefront data is stitched together to yield a characterization of the total structure.
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