发明申请
- 专利标题: APPARATUS FOR SUPPLYING SOURCE AND APPARATUS FOR DEPOSITION THIN FILM HAVING THE SAME
- 专利标题(中): 供应源的装置和沉积薄膜的装置
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申请号: US12467217申请日: 2009-05-15
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公开(公告)号: US20090288600A1公开(公告)日: 2009-11-26
- 发明人: Kyoo Hwan Lee , Hyung Sup Lee
- 申请人: Kyoo Hwan Lee , Hyung Sup Lee
- 申请人地址: KR Gyeonggi-do
- 专利权人: JUSUNG ENGINEERING CO., LTD.
- 当前专利权人: JUSUNG ENGINEERING CO., LTD.
- 当前专利权人地址: KR Gyeonggi-do
- 优先权: KR10-2008-0048016 20080523
- 主分类号: C23C16/44
- IPC分类号: C23C16/44
摘要:
The present invention provides an apparatus for supplying a source and an apparatus for depositing a thin film having the same. The apparatus for supplying a source includes a horizontal channel extending in one direction; pumping and transfer ports extending to pass through the horizontal channel, the pumping and transfer ports being spaced apart from each other; a transfer shaft inserted into the horizontal channel to reciprocate therein; and a storage room connected to one side of the pumping port, the storage room storing and supplying a powder source, wherein the transfer shaft comprises at least one transfer hole for allowing the powder source supplied through the pumping port to be filled therein and to be transferred to an external apparatus through the transfer port. As described above, according to the present invention, a powder source filled in a transfer hole is supplied to an external apparatus by reciprocating a transfer shaft, so that the amount of the powder source supplied to the external apparatus can be quantitatively controlled as much as a fixed quantity corresponding to the internal volume of the transfer hole.
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