发明申请
- 专利标题: Method for making thin film transistor
- 专利标题(中): 制造薄膜晶体管的方法
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申请号: US12384241申请日: 2009-04-02
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公开(公告)号: US20090291534A1公开(公告)日: 2009-11-26
- 发明人: Qun-Qing Li , Xue-Shen Wang , Kai-Li Jiang , Shou-Shan Fan
- 申请人: Qun-Qing Li , Xue-Shen Wang , Kai-Li Jiang , Shou-Shan Fan
- 申请人地址: CN Beijing City TW Tu-Cheng City
- 专利权人: Tsinghua University,HON HAI Precision Industry Co., LTD.
- 当前专利权人: Tsinghua University,HON HAI Precision Industry Co., LTD.
- 当前专利权人地址: CN Beijing City TW Tu-Cheng City
- 优先权: CN200810067425.9 20080523
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A method for making a thin film transistor, the method comprising the steps of: providing an insulating substrate; forming a carbon nanotube layer on the insulating substrate, the carbon nanotube layer includes a plurality of carbon nanotubes; applying a source electrode and a drain electrode spaced from each other and electrically connected to two opposite ends of at least one of carbon nanotubes; covering the carbon nanotube layer with an insulating layer; and placing a gate electrode on the insulating layer, the gate electrode being opposite to and electrically insulated from the carbon nanotube layer by the insulating layer.
公开/授权文献
- US08597990B2 Method for making thin film transistor 公开/授权日:2013-12-03
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