发明申请
- 专利标题： METHOD FOR DETECTING MALFUNCTION OF VALVE ON THE DOWNSTREAM SIDE OF THROTTLE MECHANISM OF PRESSURE TYPE FLOW CONTROL APPARATUS
- 专利标题（中）： 用于检测压力型流量控制装置的压力机构下游侧阀门故障的方法
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申请号： US12307554申请日： 2007-06-13
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公开(公告)号： US20090292399A1公开(公告)日： 2009-11-26
- 发明人: Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
- 申请人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Kaoru Hirata , Katsuyuki Sugita , Atsushi Matsumoto
- 申请人地址： JP Osaka
- 专利权人： FUJIKIN INCORPORATED
- 当前专利权人： FUJIKIN INCORPORATED
- 当前专利权人地址： JP Osaka
- 优先权： JP2006-183061 20060703
- 国际申请： PCT/JP2007/000630 WO 20070613
- 主分类号： G05D7/06
- IPC分类号： G05D7/06
摘要：
With a pressure type flow control apparatus, a valve on the downstream side of a throttle mechanism is released and a flow rate setting value Qe inputted to the pressure type flow control apparatus is changed to detect the magnitude ΔV of change of a flow rate output signal Qo from the pressure type flow control apparatus while the flow rate setting value Qe is changed, so that normal functioning of the releasing operations of the valve on the downstream side of the throttle mechanism is confirmed when the magnitude ΔV of change of the flow rate output signal Qo is above the predetermined value. If the releasing operations are malfunctioning, the magnitude ΔV of changes is found to be below the predetermined value.