发明申请
US20090296515A1 FLUID MIXING APPARATUS, INTEGRATED FLUID MIXING APPARATUS, AND FLUID MIXING SYSTEM
审中-公开
流体混合装置，集成流体混合装置和流体混合系统
- 专利标题： FLUID MIXING APPARATUS, INTEGRATED FLUID MIXING APPARATUS, AND FLUID MIXING SYSTEM
- 专利标题（中）： 流体混合装置，集成流体混合装置和流体混合系统
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申请号： US11722938申请日： 2006-12-27
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公开(公告)号： US20090296515A1公开(公告)日： 2009-12-03
- 发明人: Takahiro Ezaki , Susumu Yasuda , Mamoru Tsukada , Takayuki Teshima , Kazumichi Nakahama , Chienliu Chang
- 申请人： Takahiro Ezaki , Susumu Yasuda , Mamoru Tsukada , Takayuki Teshima , Kazumichi Nakahama , Chienliu Chang
- 优先权： JP2005-378701 20051228
- 国际申请： PCT/JP2006/326372 WO 20061227
- 主分类号： B01F15/02
- IPC分类号： B01F15/02 ; B01F15/06 ; H01L21/306
摘要：
A fluid mixing apparatus is constituted by a plurality of flow passageways for conveying fluids, respectively, and jet outlets, corresponding to and communicating with the flow passageways, respectively, for jetting the fluids therefrom so that movement directions of the fluids intersect each other to mix the fluids. The jet outlets are provided at a surface of a substrate in which the flow passageways are provided. At least one of the flow passageways communicating with at least one of the jet outlets has a center axis partially shifted from a center axis of at least one of the jet outlets so as to incline a movement direction of a fluid jetted from at least one of the jet outlets with respect to the surface of the substrate.
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